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J-GLOBAL ID:200902111684293115   Reference number:94A0553702

Study on Measurement of Axisymmetrical Form Generated by Ultra-Precision Machining. (1st Report). Principle and Simulation of Measurement.

超精密軸対称加工品の形状測定に関する研究 (第1報) 測定原理とシミュレーション
Author (4):
Material:
Volume: 60  Issue:Page: 867-871  Publication year: Jun. 1994 
JST Material Number: F0268A  ISSN: 0912-0289  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Category name(code) classified by JST.
Measuring methods and instruments of length,area,cross section,volume,angle 
Reference (4):
  • 1) T. Nomura, H. Miyoshiro, K. Kamiya, K. Yoshikawa, H. Tashiro, M. Suzuki, M. Yusuki & F. Kobayashi : Shape Measurement of Work Piece Surface with Zone-Plate Interferometer during Machine Running, Prec. Eng., 15, 2, (1993) 86.
  • 2) T. Nomura, K. Yoshikawa, H. Tashiro, K. Takeuchi, N. Ozawa, Y. Okazaki, M. Suzuki, F. Kobayashi & M. Usuki : On-Machine Shape Measurement of Work Piece Surface with Fizeau Interferometer, Prec. Eng., 14, 3, (1992) 155.
  • 3) J. Meijer & W. De Bruin : Determination of Flatness from Straightness Measurements and Characterization of Surface by Four Parameters, Prec. Eng., 3, 1, (1981) 17.
  • 4) 渡邊 学, 大平紀之, 堀内 宰 : 超精密加工機の工具一工作物間運動誤差補償法(第3報), 1993年度精密工学会春季大会学術講演会講演論文集, (1993)491.

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