Tantalum pentoxide(Ta<sub>2</sub>O<sub>5</sub>) thin films for advanced dielectric applications.

CHANELIERE C; AUTRAN J L; DEVINE R A B; BALLAND B

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J-GLOBAL ID：200902111878416366 Reference number：98A0640925

Tantalum pentoxide(Ta₂O₅) thin films for advanced dielectric applications.

進歩した誘電応用のための五酸化タンタル(Ta₂O₅)薄膜

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Material：
Volume： R22 Issue： 6 Page： 269-322 Publication year： May. 25, 1998
JST Material Number： T0341A ISSN： 0927-796X Document type： Article
Article type：文献レビュー Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Oxide thin films

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Tantalum pentoxide(Ta2O5) thin films for advanced dielectric applications.

Tantalum pentoxide(Ta₂O₅) thin films for advanced dielectric applications.