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J-GLOBAL ID:200902112224881589   Reference number:99A0390432

Insulator Investigation on SiC for Improved Reliability.

信頼性向上のためのSiC上絶縁体の調査
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Volume: 46  Issue:Page: 525-532  Publication year: Mar. 1999 
JST Material Number: C0222A  ISSN: 0018-9383  CODEN: IETDAI  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Transistors  ,  Metal-insulator-semiconductor structures 
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