Art
J-GLOBAL ID:200902112808734278   Reference number:02A0637168

Effect of the species of sputtering gas on the composition of multi-component glass film: A new approach to control the composition of multi-component glass film.

多成分系ガラス膜の組成へのスパッタリングガス種による影響 多成分系ガラス膜の組成を制御する新しい試み
Author (2):
Material:
Volume: 21  Issue: 10  Page: 765-766  Publication year: May. 15, 2002 
JST Material Number: D0919B  ISSN: 0261-8028  CODEN: JMTSAS  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
Thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
,...
Semi thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.

   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=02A0637168&from=J-GLOBAL&jstjournalNo=D0919B") }}
JST classification (2):
JST classification
Category name(code) classified by JST.
Ceramic coating to nonmetallic materials  ,  Oxide thin films 

Return to Previous Page