Art
J-GLOBAL ID：200902112959464221
Reference number：00A0400047
Sputtered Species from Cu and YBa2Cu3Ox Targets Studied by Quadrupole Mass Spectrometer.
四重極質量分析計により調べたCuとYBa2Cu3Oxターゲットからのスパッタ粒子
Author (1)：
Material：
Issue：
24
Page：
171-178
Publication year：
Mar. 20, 2000
JST Material Number：
S0956A
ISSN：
0916-1902
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
Thesaurus term：
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Properties of oxide superconductors
, Oxide thin films
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