Art
J-GLOBAL ID:200902114054097287
Reference number:93A0630427
Introduction to Plasma Experiment II. 2. 2 Plasma Production by r.f. Discharge.
プラズマ実験入門 II 2. プラズマの作り方 2.2 高周波放電を用いる方法
Author (1):
Material:
Volume:
69
Issue:
6
Page:
639-641
Publication year:
Jun. 1993
JST Material Number:
G0114A
ISSN:
0918-7928
Document type:
Article
Article type:
解説
Country of issue:
Japan (JPN)
Language:
JAPANESE (JA)
Thesaurus term:
Thesaurus term/Semi thesaurus term
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JST classification (2):
JST classification
Category name(code) classified by JST.
Gas discharges
, Plasma production and heating
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