Art
J-GLOBAL ID：200902114190122481
Reference number：94A0040128
Formation of Nanometer-Size Silicon Particles in a Laser Induced Plasma in SiH4.
SiH4のレーザ誘起プラズマによるナノメータ径のけい素微粒子の生成
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Author (3)：
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Material：
Volume：
97
Issue：
11
Page：
1493-1496
Publication year：
Nov. 1993
JST Material Number：
E0432A
ISSN：
0005-9021
CODEN：
BBPCAX
Document type：
Article
Article type：
短報
Country of issue：
Germany, Federal Republic of (DEU)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Colloid chemistry in general
Terms in the title (5)：
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