Art
J-GLOBAL ID：200902114235385500   Reference number：94A0704940

Effect of metal work function on the formation of W and Mo contacts to 3C-SiC.

3C-SiCへのW及びMo接触形成への金属仕事関数の影響
Author (5)：
JACOB C

About JACOB C

(Case Western Reserve Univ., OH)

About Case Western Reserve Univ., OH

, 
NISHINO S

About NISHINO S

(Case Western Reserve Univ., OH)

About Case Western Reserve Univ., OH

, 
MEHREGANY M

About MEHREGANY M

(Case Western Reserve Univ., OH)

About Case Western Reserve Univ., OH

, 
POWELL J A

About POWELL J A

(NASA Lewis Research Center, OH)

About NASA Lewis Research Center, OH

, 
PIROUZ P

About PIROUZ P

(Case Western Reserve Univ., OH)

About Case Western Reserve Univ., OH


Material：
Institute of Physics Conference Series  (Inst Phys Conf Ser)

About Institute of Physics Conference Series


Issue： 137  Page： 247-250  Publication year： 1994 
JST Material Number： E0403B  ISSN： 0305-2346  CODEN： IPHSAC  Document type： Proceedings
Article type： 短報  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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silicon carbide

About silicon carbide

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Semiconductor-metal contacts 
(BM03084G)

About Semiconductor-metal contacts

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
3C-SiC

About 3C-SiC

, 
Mo

About Mo

, 
仕事関数

About 仕事関数


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