Art
J-GLOBAL ID:200902114702671903
Reference number:93A0813465
Aluminium Diffusion in Titanium Nitride Films. Efficiency of TiN Barrier Layers.
窒化チタン膜中のアルミニウムの拡散 TiN障壁層の効率
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Author (6):
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Material:
Volume:
57
Issue:
2
Page:
195-197
Publication year:
Aug. 1993
JST Material Number:
D0256C
ISSN:
0947-8396
CODEN:
APHYCC
Document type:
Article
Article type:
原著論文
Country of issue:
Germany, Federal Republic of (DEU)
Language:
ENGLISH (EN)
Thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
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Semi thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
JST classification (3):
JST classification
Category name(code) classified by JST.
Diffusion in metals
, Semiconductor-metal contacts
, Manufacturing technology of solid-state devices
Terms in the title (6):
Terms in the title
Keywords automatically extracted from the title.
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