Art
J-GLOBAL ID：200902114803886501   Reference number：96A0149722

Electrical characterization of the β-FeSi2/Si heterojunction after thermal oxidation.

熱酸化後のβ-FeSi2/Siヘテロ接合の電気的評価
Author (2)：
ERLESAND U

About ERLESAND U

(Kungliga Tekniska Hoegskolan, Kista-Stockholm, SWE)

About Kungliga Tekniska Hoegskolan, Kista-Stockholm, SWE

, 
OESTLING M

About OESTLING M

(Kungliga Tekniska Hoegskolan, Kista-Stockholm, SWE)

About Kungliga Tekniska Hoegskolan, Kista-Stockholm, SWE


Material：
Applied Physics Letters  (Appl Phys Lett)

About Applied Physics Letters


Volume： 68  Issue： 1  Page： 105-107  Publication year： Jan. 01, 1996 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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silicon

About silicon

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Semiconductor-semiconductor contacts without Gr.13-15 element compounds 
(BM03083P)

About Semiconductor-semiconductor contacts without Gr.13-15 element compounds

,  Lattice defects in semiconductors 
(BK12040Q)

About Lattice defects in semiconductors

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
熱酸化

About 熱酸化

, 
Si

About Si

, 
ヘテロ接合

About ヘテロ接合

, 
評価

About 評価


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