Art
J-GLOBAL ID：200902115563130796   Reference number：01A0552158

Experimental and numerical study on pulsed-laser annealing process of diamond-like carbon thin films.

ダイヤモンド状炭素薄膜のパルスレーザアニーリングプロセスに関する実験と数値解析
Author (3)：
NAKAMIYA T

About NAKAMIYA T

(Kyushu Tokai Univ., Kumamoto, JPN)

About Kyushu Tokai Univ., Kumamoto, JPN

, 
AOQUI S

About AOQUI S

(Sojo Univ., Kumamoto, JPN)

About Sojo Univ., Kumamoto, JPN

, 
EBIHARA K

About EBIHARA K

(Kumamoto Univ., Kumamoto, JPN)

About Kumamoto Univ., Kumamoto, JPN


Material：
Diamond and Related Materials  (Diam Relat Mater)

About Diamond and Related Materials


Volume： 10  Issue： 3/7  Page： 905-909  Publication year： Mar. 2001 
JST Material Number： W0498A  ISSN： 0925-9635  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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All keywords is available on JDreamIII(charged).
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*DLC film

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,...
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JST classification (1)：
JST classification
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Laser irradiation effects and damages 
(BK16040S)

About Laser irradiation effects and damages

Terms in the title (4)：
Terms in the title
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ダイヤモンド状炭素

About ダイヤモンド状炭素

, 
薄膜

About 薄膜

, 
実験

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, 
数値解析

About 数値解析


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