Numerical Analysis of the Electromagnetic Fields in a Microwave Plasma Source Excited by Azimuthally Symmetric Surface Waves.

KOUSAKA H; ONO K

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J-GLOBAL ID：200902115688372686 Reference number：02A0442236

Numerical Analysis of the Electromagnetic Fields in a Microwave Plasma Source Excited by Azimuthally Symmetric Surface Waves.

方位角方向に対称な表面波で励起したマイクロ波プラズマ源中の電磁場の数値解析

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Material：
Volume： 41 Issue： 4A Page： 2199-2206 Publication year： Apr. 15, 2002
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Plasma devices , Manufacturing technology of solid-state devices

Reference (26)：

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3) Yu. M. Aliev, H. Schluter and A. Shivarova: Guided-Wave-Produced Plasmas (Springer, New York, 2000).
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5) A. W. Trivelpiece and R. W. Gould: J. Appl. Phys. 30 (1959) 1784.

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