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J-GLOBAL ID：200902116954941396   Reference number：93A0826775

Ultraprecision machining.

超精密加工でなにができるのか
Author (1)：
MORIWAKI TOSHIMICHI

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(神戸大 工)

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Material：
メカライフ

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Issue： 33  Page： 4-5  Publication year： Sep. 1993 
JST Material Number： L0093A  ISSN： 0912-2400  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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ultraprecision machining

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Manufacturing technology of solid-state devices 
(NC03030V)

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精密加工

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