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J-GLOBAL ID:200902117082616507   Reference number:99A0202810

Low Temperature High Density Nucleation of Diamond in Hot Filament Chemical Vapour Deposition.

熱フィラメント・気相成長によるダイヤモンドの低温高密度核生成
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Volume: 34  Page: 73-79  Publication year: Dec. 1998 
JST Material Number: Z0741A  ISSN: 0285-5372  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Semiconductor thin films 
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