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J-GLOBAL ID:200902117426144790   Reference number:96A0192585

Effect of Temperature on the Interaction of Silicon with Nonionic Surfactants in Alkaline Solutions.

アルカリ性溶液におけるシリコンと非イオン性界面活性剤との相互作用に対する温度の影響
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Volume: 143  Issue:Page: 277-283  Publication year: Jan. 1996 
JST Material Number: C0285A  ISSN: 1945-7111  CODEN: JESOAN  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices 
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