Art
J-GLOBAL ID：200902117622117602   Reference number：96A0036988

Design of a nanometric position sensor based on computational metrology of the circle.

円のコンピュータ計測に基づくナノメータ位置センサの設計
Author (3)：
PEGNA J

About PEGNA J

(Rensselaer Polytechnic Inst., New York)

About Rensselaer Polytechnic Inst., New York

, 
GUO C

About GUO C

(Rensselaer Polytechnic Inst., New York)

About Rensselaer Polytechnic Inst., New York

, 
HILAIRE T P

About HILAIRE T P

(Renault Corporate R&D, Rueil Malmaison, FRA)

About Renault Corporate R&D, Rueil Malmaison, FRA


Material：
ASME. DE (American Society of Mechanical Engineers. Design Engineering Division)  (ASME DE (Am Soc Mech Eng Des Eng Div))

About ASME. DE (American Society of Mechanical Engineers. Design Engineering Division)


Volume： 82  Page： 301-308  Publication year： 1995 
JST Material Number： T0457A  Document type： Proceedings
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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position sensor

About position sensor

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Measuring methods and instruments of length,area,cross section,volume,angle 
(AD05020O)

About Measuring methods and instruments of length,area,cross section,volume,angle

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
円

About 円

, 
コンピュータ

About コンピュータ

, 
計測

About 計測

, 
ナノメータ

About ナノメータ

, 
位置センサ

About 位置センサ

, 
設計

About 設計


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