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J-GLOBAL ID:200902118076627005   Reference number:97A0714110

Preparation and characterization of MgTiO3 thin films by atmospheric pressure metalorganic chemical vapor deposition.

大気圧有機金属化学蒸着によるMgTiO3薄膜の調製と特性評価
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Volume: 178  Issue:Page: 355-359  Publication year: Jul. 1997 
JST Material Number: B0942A  ISSN: 0022-0248  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Oxide thin films 
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