Art
J-GLOBAL ID:200902119113381530   Reference number:01A0190269

Flow modelling of a Holweck pump stage in the viscous regime.

粘性領域におけるHolweckポンプステージの流れモデリング
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Material:
Volume: 60  Issue: 1/2  Page: 73-83  Publication year: Jan. 2001 
JST Material Number: E0347A  ISSN: 0042-207X  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Vacuum production and techniques 
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