Art
J-GLOBAL ID：200902119345800114   Reference number：99A0939352

Ru and RuO2 Thin Films by XPS.

XPSで調べたRu薄膜とRuO2薄膜
Author (5)：
KAGA Y

About KAGA Y

(Kitami Inst. Technol., JPN)

About Kitami Inst. Technol., JPN

, 
ABE Y

About ABE Y

(Kitami Inst. Technol., JPN)

About Kitami Inst. Technol., JPN

, 
YANAGISAWA H

About YANAGISAWA H

(Kitami Inst. Technol., JPN)

About Kitami Inst. Technol., JPN

, 
KAWAMURA M

About KAWAMURA M

(Kitami Inst. Technol., JPN)

About Kitami Inst. Technol., JPN

, 
SASAKI K

About SASAKI K

(Kitami Inst. Technol., JPN)

About Kitami Inst. Technol., JPN


Material：
Surface Science Spectra  (Surf Sci Spectra)

About Surface Science Spectra


Volume： 6  Issue： 1  Page： 68-74  Publication year： 1999 
JST Material Number： W0429A  ISSN： 1055-5269  CODEN： SSSPEN  Document type： Article
Article type： データシートなど  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*ruthenium

About ruthenium

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Electron spectroscopy 
(BM09060K)

About Electron spectroscopy

,  Metallic thin films 
(BK14030T)

About Metallic thin films

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
XPS

About XPS

, 
Ru

About Ru

, 
薄膜

About 薄膜


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