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J-GLOBAL ID:200902120355669170   Reference number:00A0433928

Three-Dimensional Micro-Channel Fabrication in Polydimethylsiloxane(PDMS) Elastomer.

ポリジメチルシロキサン(PDMS)合成ゴムにおける三次元マイクロチャネルの製造
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Volume:Issue:Page: 76-81  Publication year: Mar. 2000 
JST Material Number: W0357A  ISSN: 1057-7157  CODEN: JMIYET  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices 
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