Flatness measurement by reflection moire technique.

FUJIWARA H; OTANI Y; YOSHIZAWA T

Art

J-GLOBAL ID：200902121070296920 Reference number：97A0157890

Flatness measurement by reflection moire technique.

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Author (3)： , ,
Material：
Volume： 2862 Page： 172-176 Publication year： 1996
JST Material Number： D0943A ISSN： 0277-786X CODEN： PSISDG Document type： Proceedings
Country of issue： United States (USA) Language： ENGLISH (EN)

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