Art
J-GLOBAL ID：200902121425566125
Reference number：99A0419798
Design of Radial Line Slot Antennas at 8.3 GHz for Large Area Uniform Plasma Generation.
大面積均一プラズマ生成のため8.3GHzでの放射線状スロットアンテナの設計
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Author (6)：
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Material：
Volume：
38
Issue：
4A
Page：
2082-2088
Publication year：
Apr. 15, 1999
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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Keywords indexed to the article.
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Plasma production and heating
, Plasma devices
Reference (10)：
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(1) N. Goto and M. Yamamoto: Inst. Electr. Commun. Eng. Tech. Rep. AP80-57 (1980) 43 [in Japanese].
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(2) M. Takahashi, J. Takada, M. Ando and N. Goto: Proc. Inst. Electr. Eng. 139 (1992) No. 1, 79.
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(3) J. Hirokawa, J. Takada, M. Ando and N. Goto: Proc. Inst. Electr. Eng. 137 (1990) No. 5, 249.
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(4) T. Ohmi: Preface in New Era of Semiconductor Manufacturing I, Ultra Clean Technol. 9 (1997) Suppl. 1.
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(5) M. Hirayama and T. Ohmi: Proc. 30th Symp. ULSI Ultra Clean Technol. (1997) p.51.
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Terms in the title
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