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J-GLOBAL ID:200902122473265273   Reference number:94A0896884

Uniform Ultra-Thin Pb(Zr,Ti)O3 Films Formed by Metal-Organic Chemical Vapor Deposition and Their Electrical Characteristics.

有機金属化学蒸着による均一なPb(Zr,Ti)O3超薄膜と電気特性
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Material:
Volume: 33  Issue: 9B  Page: 5143-5146  Publication year: Sep. 1994 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Oxide thin films  ,  Ferroelectrics,antiferroelectrics and ferroelasticity  ,  Memory units 

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