Art
J-GLOBAL ID：200902122519481600
Reference number：00A0839874
Highly reliable Pd-based ohmic contacts to p-type InP.
p型InPに対する高信頼性Pd系オーミック・コンタクト材
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Author (6)：
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Material：
Volume：
100
Issue：
236(ED2000 100-109)
Page：
15-20
Publication year：
Jul. 28, 2000
JST Material Number：
S0532B
ISSN：
0913-5685
Document type：
Proceedings
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
JAPANESE (JA)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Semiconductor-metal contacts
Reference (9)：
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YAMAGUCHI, A. Bunseki Kagaku. 1991, 40, 741
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SANDS, T. Appl. Phys. Lett. 1987, 50, 1346
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IVEY, D. G. J. Electron. Mater. 1992, 21, 831
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MARSHALL, E. D. J. Appl. Phys. 1987, 62, 942
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FURUMAI, M. J. Electron. Mater. 1996, 25, 1684
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