Growth of GaN films by hot wall epitaxy.

ISHIDA A; YAMAMOTO E; ISHINO K; ITO K; FUJIYASU H; NAKANISHI Y

Art

J-GLOBAL ID：200902122683887609 Reference number：95A0757100

Growth of GaN films by hot wall epitaxy.

ホットウォールエピタクシーによるGaN膜の成長

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Author (6)： , , , , ,
Material：
Volume： 67 Issue： 5 Page： 665-666 Publication year： Jul. 31, 1995
JST Material Number： H0613A ISSN： 0003-6951 CODEN： APPLAB Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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Semiconductor thin films

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