Art

J-GLOBAL ID：200902123684000507   Reference number：97A0953888

Comparison of surface oxidation of titanium nitride and chromium nitride films studied by x-ray absorption and photoelectron spectroscopy.

X線吸収とX線光電子分光で調べた窒化チタンと窒化クロム膜の表面酸化の比較

Author (9)： ESAKA F (Sci. Univ. Tokyo, Tokyo, JPN) ,  FURUYA K (Sci. Univ. Tokyo, Tokyo, JPN) ,  SHIMADA H (National Inst. Materials and Chemical Res., Ibaraki, JPN) ,  IMAMURA M (National Inst. Materials and Chemical Res., Ibaraki, JPN) ,  MATSUBAYASHI N (National Inst. Materials and Chemical Res., Ibaraki, JPN) ,  SATO H (National Inst. Materials and Chemical Res., Ibaraki, JPN) ,  NISHIJIMA A (National Inst. Materials and Chemical Res., Ibaraki, JPN) ,  KAWANA A (Sumitomo Metal Mining Co. Ltd., Chiba, JPN) ,  ICHIMURA H (Sumitomo Metal Mining Co. Ltd., Chiba, JPN)
Material： Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)
Volume： 15  Issue： 5  Page： 2521-2528  Publication year： Sep. 1997 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： chromium compound ,...

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JST classification (2)： Oxide thin films  (BK14050P) ,  Other noncatalytic reactions  (CB06070U)

Terms in the title (5)： X線吸収 ,  X線光電子分光 ,  窒化チタン ,  窒化クロム ,  表面酸化