Pulsed laser deposition of amorphous diamond-like carbon films with ArF (193nm) excimer laser.

XIONG F; WANG Y Y; LEPPERT V; CHANG R P H

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J-GLOBAL ID：200902125642829385 Reference number：93A0853199

Pulsed laser deposition of amorphous diamond-like carbon films with ArF (193nm) excimer laser.

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Author (4)： , , ,
Material：
Volume： 8 Issue： 9 Page： 2265-2272 Publication year： Sep. 1993
JST Material Number： D0987B ISSN： 0884-2914 CODEN： JMREEE Document type： Article
Country of issue： United States (USA) Language： ENGLISH (EN)

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