Art
J-GLOBAL ID：200902125811684170
Reference number：95A0568967
Electrical Properties of TiN Thin Films Deposited on Insulating Substrates.
絶縁体基板上のTiN薄膜の電気特性
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Author (4)：
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,
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Material：
Volume：
42nd
Issue：
Pt 2
Page：
532
Publication year：
Mar. 1995
JST Material Number：
Y0054A
Document type：
Proceedings
Country of issue：
Japan (JPN)
Language：
JAPANESE (JA)
Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
,
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