Studies on High Flatness Polishing of Magnetic Disk Substrate with Al<sub>2</sub>O<sub>3</sub> Abrasives. (1st Report). Polishing Mechanism and Influence of Polisher Type on Polishing Results.

YASUI HEIJI; SATO KAORU; MATSUNAGA RYUJI; KOBAYASHI FUKASHI

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J-GLOBAL ID：200902126322396193 Reference number：94A0139859

Studies on High Flatness Polishing of Magnetic Disk Substrate with Al₂O₃ Abrasives. (1st Report). Polishing Mechanism and Influence of Polisher Type on Polishing Results.

アルミナ砥粒による磁気ディスク基板の高平滑ポリシングに関する研究 (第1報) 除去機構とポリシング特性に及ぼすポリシャの種類の影響

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Material：
Volume： 60 Issue： 1 Page： 128-132 Publication year： Jan. 1994
JST Material Number： F0268A ISSN： 0912-0289 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Grinding

Reference (3)：

1) 例えば, 三橋眞成 : 磁気ディスク基板の研磨加工, 精密機械, 51, 9 (1985) 1744.
2) 佐藤郁, 安井平司, 山下忠興, 小林深 : 高精密ポリシソグに関する研究, 1990年度精密工学会長崎地方講演会, (1990) 61.
3) 例えば, 福井茂寿, 木暮賢司, 三矢保永 : 走行面のうねりに対する浮動スライダの追従特性, 日本機械学会論文集, 51,469, C (1985) 2291.

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Studies on High Flatness Polishing of Magnetic Disk Substrate with Al2O3 Abrasives. (1st Report). Polishing Mechanism and Influence of Polisher Type on Polishing Results.

Studies on High Flatness Polishing of Magnetic Disk Substrate with Al₂O₃ Abrasives. (1st Report). Polishing Mechanism and Influence of Polisher Type on Polishing Results.