Art
J-GLOBAL ID:200902126566735518   Reference number:02A0186758

Precipitation-enhanced diffusion of nickel in dislocation-free silicon studied by in-diffusion and annealing processes.

Author (3):
Material:
Volume: 308/310  Page: 427-430  Publication year: Dec. 2001 
JST Material Number: H0676B  ISSN: 0921-4526  Document type: Article
Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)

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