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J-GLOBAL ID:200902126608844797   Reference number:00A0993843

Application of the LIGA Process for Fabrication of Gas Avalanche Devices.

ガスアバランシェ装置の製作のためのLIGA過程の応用
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Volume: 47  Issue: 3,Pt.2  Page: 923-927  Publication year: Jun. 2000 
JST Material Number: C0235A  ISSN: 0018-9499  CODEN: IETNAE  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Experimental techniques for particle and nuclear physics in general  ,  X-ray instruments and techniques 
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