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J-GLOBAL ID:200902127602055711   Reference number:00A0764254

Piezoelectric Micromotor Using a Metal-Ceramic Composite Structure.

金属-セラミック複合体構造を使用した圧電マイクロモータ
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Volume: 47  Issue:Page: 836-843  Publication year: Jul. 2000 
JST Material Number: H0369A  ISSN: 0885-3010  CODEN: ITUCER  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Motors  ,  Other applications of acoustics 
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