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J-GLOBAL ID:200902128266364243   Reference number:94A0000972

Special Issue “Positioning of Pneumatic Cylinder”. Hybrid Type of Pneumatic and Ultrasonic Actuators for Precision Linear Positioning.

空気圧シリンダの位置決め 空気圧・圧電超音波ハイブリッド方式による精密直線位置決め
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Material:
Volume: 24  Issue:Page: 762-768  Publication year: Nov. 1993 
JST Material Number: S0170A  ISSN: 0286-6900  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Hydraulic and pneumatic equipment 

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