Nanopatterning of self-assembled monolayers on Si-surfaces with AFM lithography.

LEE W B; OH Y; KIM E R; LEE H

Art

J-GLOBAL ID：200902128425264034 Reference number：01A0274803

Nanopatterning of self-assembled monolayers on Si-surfaces with AFM lithography.

AFMリソグラフィーによるSi表面上の自己集合単分子層のナノパターン形成

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Author (4)： , , ,
Material：
Volume： 117 Issue： 1/3 Page： 305-306 Publication year： Feb. 15, 2001
JST Material Number： C0123B ISSN： 0379-6779 Document type： Article
Article type：短報 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Solid-liquid interface , Microscopy determination of structures , Thin films of organic compounds

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