Through-wafer interrogation of microstructure motion for MEMS feedback control.

DAWSON J M; CHEN J; BROWN K S; FAMOURI P; HORNAK L A

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J-GLOBAL ID：200902128499063243 Reference number：00A0110308

Through-wafer interrogation of microstructure motion for MEMS feedback control.

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Author (5)： , , , ,
Material：
Volume： 3878 Page： 281-292 Publication year： 1999
JST Material Number： D0943A ISSN： 0277-786X CODEN： PSISDG Document type： Proceedings
Country of issue： United States (USA) Language： ENGLISH (EN)

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