Fabrication of Single-Crystal Si Microstructures by Anodization.

HIGA K; ASANO T

Art

J-GLOBAL ID：200902128786382457 Reference number：97A0262660

Fabrication of Single-Crystal Si Microstructures by Anodization.

陽極酸化による単結晶Siミクロ構造の製作

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Author (2)： ,
Material：
Volume： 35 Issue： 12B Page： 6648-6651 Publication year： Dec. 1996
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

Reference (4)：

IMAI, K. Solid State Electron. 1981, 24, 159
CHO, C. S. Ext.Abs.Microprocess Conf. 1993, 198
MAGEE, C. W. Nucl.Instrum.& Method. 1978, 145, 529
YOSHIZAWA, M. J.Electrochem.Soc. 1984, 131, 453

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