Studies on High Flatness Polishing of Magnetic Disk Substrate with Al<sub>2</sub>O<sub>3</sub> Abrasives(2ne Report). Influence of Polishing Conditions on Removal Rate and Slight Undulation.

YASUI HEIJI; SATO KAORU; MATSUNAGA RYUJI; SUZUKI YUKIO

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J-GLOBAL ID：200902128928553963 Reference number：95A0101217

Studies on High Flatness Polishing of Magnetic Disk Substrate with Al₂O₃ Abrasives(2ne Report). Influence of Polishing Conditions on Removal Rate and Slight Undulation.

アルミナ砥粒による磁気ディスク基板の高平滑ポリシングに関する研究(第2報) 除去速度と微小うねりに及ぼすポリシング条件の影響

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Material：
Volume： 60 Issue： 11 Page： 1631-1636 Publication year： Nov. 1994
JST Material Number： F0268A ISSN： 0912-0289 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Reference (1)：

1) 安井平司, 佐藤郁, 小林深 : アルミナ砥粒による磁気ディスク基板の高平滑ポリシングに関する研究 (第1報), 精密工学会誌, 60, 1 (1994) 128.

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Studies on High Flatness Polishing of Magnetic Disk Substrate with Al2O3 Abrasives(2ne Report). Influence of Polishing Conditions on Removal Rate and Slight Undulation.

Studies on High Flatness Polishing of Magnetic Disk Substrate with Al₂O₃ Abrasives(2ne Report). Influence of Polishing Conditions on Removal Rate and Slight Undulation.