Art
J-GLOBAL ID：200902131055549817   Reference number：03A0045648

Study on a Thin-Film Gas-Sensor Using Surface Micro-Machining.

表面マイクロマシン技術による薄膜ガスセンサの研究
Author (2)：
HARA KAZUHIRO

About HARA KAZUHIRO

(東京電機大 工)

About 東京電機大 工

, 
ITO AKIHITO

About ITO AKIHITO

(東京電機大 工)

About 東京電機大 工


Material：
超電導応用研究所ハイテク・リサーチ・センター研究成果報告書 2001

About 超電導応用研究所ハイテク・リサーチ・センター研究成果報告書 2001


Page： 107-110  Publication year： 2002 
JST Material Number： N20022579  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*gas sensor

About gas sensor

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
microsensor

About microsensor


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JST classification (3)：
JST classification
Category name(code) classified by JST.
Analytical instruments 
(CC02020S)

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,  Manufacturing technology of solid-state devices 
(NC03030V)

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,  Semiconductor thin films 
(BK14040E)

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Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
マイクロマシン技術

About マイクロマシン技術

, 
薄膜

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, 
ガスセンサ

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, 
研究

About 研究


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