Art
J-GLOBAL ID：200902131317941098   Reference number：98A0033427

Ion energy distribution in plasma immersion ion implantation.

プラズマ浸漬イオン注入のイオンエネルギー分布
Author (4)：
MAENDL S

About MAENDL S

(Res. Center Rossendorf, Inc., Dresden, DEU)

About Res. Center Rossendorf, Inc., Dresden, DEU

, 
BRUTSCHER J

About BRUTSCHER J

(Res. Center Rossendorf, Inc., Dresden, DEU)

About Res. Center Rossendorf, Inc., Dresden, DEU

, 
GUENZEL R

About GUENZEL R

(Res. Center Rossendorf, Inc., Dresden, DEU)

About Res. Center Rossendorf, Inc., Dresden, DEU

, 
MOELLER W

About MOELLER W

(Res. Center Rossendorf, Inc., Dresden, DEU)

About Res. Center Rossendorf, Inc., Dresden, DEU


Material：
Surface & Coatings Technology  (Surf Coat Technol)

About Surface & Coatings Technology


Volume： 93  Issue： 2/3  Page： 234-237  Publication year： Sep. 1997 
JST Material Number： D0205C  ISSN： 0257-8972  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Stainless Steel

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,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Irradiational changes of metals 
(BK16122N)

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,  Applications of plasma 
(BJ02110K)

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Terms in the title (2)：
Terms in the title
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プラズマ浸漬イオン注入

About プラズマ浸漬イオン注入

, 
イオンエネルギー分布

About イオンエネルギー分布


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