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J-GLOBAL ID:200902132895141181   Reference number:95A0262284

Special Issue on Micromachines and Micro Electro Mechanical Systems. Formation of Black Membrane Using a Microfabricated Orifice.

微細作製のオリフィスを使った黒膜の形成
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Volume: E78-C  Issue:Page: 157-161  Publication year: Feb. 1995 
JST Material Number: L1370A  ISSN: 0916-8524  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Biomembrane in general  ,  Manufacturing technology of solid-state devices 
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