Art
J-GLOBAL ID：200902133213071612   Reference number：02A0431686

Lubricating behavior in chemical-mechanical polishing of copper.

銅の化学-機械研磨における潤滑挙動
Author (2)：
LIANG H

About LIANG H

(Univ. Alaska Fairbanks, AK, USA)

About Univ. Alaska Fairbanks, AK, USA

, 
XU G H

About XU G H

(Univ. Alaska Fairbanks, AK, USA)

About Univ. Alaska Fairbanks, AK, USA


Material：
Scripta Materialia  (Scr Mater)

About Scripta Materialia


Volume： 46  Issue： 5  Page： 343-347  Publication year： Mar. 11, 2002 
JST Material Number： B0915A  ISSN： 1359-6462  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
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*copper

About copper

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
CMP

About CMP

,...
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Other surface treatment 
(WC08070F)

About Other surface treatment

,  Lubrication in general 
(QB02010S)

About Lubrication in general

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
銅

About 銅

, 
化学

About 化学

, 
機械研磨

About 機械研磨

, 
潤滑

About 潤滑

, 
挙動

About 挙動


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