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J-GLOBAL ID:200902133213071612   Reference number:02A0431686

Lubricating behavior in chemical-mechanical polishing of copper.

銅の化学-機械研磨における潤滑挙動
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Material:
Volume: 46  Issue:Page: 343-347  Publication year: Mar. 11, 2002 
JST Material Number: B0915A  ISSN: 1359-6462  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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JST classification (3):
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Category name(code) classified by JST.
Manufacturing technology of solid-state devices  ,  Other surface treatment  ,  Lubrication in general 
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