Large area electron-beam-excited plasma of meter size for industrial applications.

HOMYARA H; AHMAD S; IKEZAWA S; FAMAKINWA T; ODA H; YOSHIMURA K; TAODA H; FUJII S; HARA T

Art

J-GLOBAL ID：200902133344515974 Reference number：02A0687148

Large area electron-beam-excited plasma of meter size for industrial applications.

工業用メートルサイズの大面積電子ビーム励起プラズマ

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Material：
Volume： 66 Issue： 3/4 Page： 203-207 Publication year： Aug. 19, 2002
JST Material Number： E0347A ISSN： 0042-207X Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Vapor plating , Plasma devices , Oxide thin films

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