Art
J-GLOBAL ID：200902134992689453   Reference number：96A0244852

Growth of Group III Nitrides. A Review of Precursors and Techniques.

第III族窒化物の成長 前駆体と方法に関するレビュー
Author (2)：
NEUMAYER D A

About NEUMAYER D A

(Univ. Texas, Texas)

About Univ. Texas, Texas

, 
EKERDT J G

About EKERDT J G

(Univ. Texas, Texas)

About Univ. Texas, Texas


Material：
Chemistry of Materials  (Chem Mater)

About Chemistry of Materials


Volume： 8  Issue： 1  Page： 9-25  Publication year： Jan. 1996 
JST Material Number： T0893A  ISSN： 0897-4756  CODEN： CMATEX  Document type： Article
Article type： 文献レビュー  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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aluminum nitride

About aluminum nitride

,...
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JST classification (1)：
JST classification
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Semiconductor thin films 
(BK14040E)

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Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
III族

About III族

, 
窒化物

About 窒化物

, 
成長

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, 
前駆体

About 前駆体

, 
レビュー

About レビュー


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