Art
J-GLOBAL ID：200902135615458060   Reference number：99A0658986

Very low power consumption micromachined CO sensors.

極低電力消費の微細加工COセンサ
Author (5)：
FAGLIA G

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(Univ. Brescia, Brescia, ITA)

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, 
COMINI E

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(Univ. Brescia, Brescia, ITA)

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, 
CRISTALLI A

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(Univ. Brescia, Brescia, ITA)

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, 
SBERVEGLIERI G

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(Univ. Brescia, Brescia, ITA)

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, 
DORI L

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(LAMEL Inst., CNR, Bologna, ITA)

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Material：
Sensors and Actuators. B. Chemical  (Sens Actuators B Chem)

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Volume： B55  Issue： 2/3  Page： 140-146  Publication year： May. 11, 1999 
JST Material Number： T0967A  ISSN： 0925-4005  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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*gas sensor

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,...
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Thesaurus term/Semi thesaurus term
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シリコン

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,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Analytical instruments 
(CC02020S)

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,  Manufacturing technology of solid-state devices 
(NC03030V)

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Benzene

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Terms in the title (3)：
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低電力消費

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, 
微細加工

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, 
COセンサ

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