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J-GLOBAL ID:200902136382576595   Reference number:01A0768097

電気化学測定用ECRスパッタカーボン膜の作製

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Material:
Volume: 68th  Page: 46  Publication year: Mar. 25, 2001 
JST Material Number: Y0048A  Document type: Proceedings
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Semiconductor thin films  ,  Electrochemical reaction 
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