Art
J-GLOBAL ID：200902136521663511   Reference number：98A0739751

Improved high-temperature stability of Si incorporated a-C:H films.

Siを導入したa-C:H膜の高温安定性の向上
Author (6)：
CAMARGO S S JR

About CAMARGO S S JR

(Univ. Federal do Rio de Janeiro, RJ, BRA)

About Univ. Federal do Rio de Janeiro, RJ, BRA

, 
NETO A L B

About NETO A L B

(Univ. Federal do Rio de Janeiro, RJ, BRA)

About Univ. Federal do Rio de Janeiro, RJ, BRA

, 
SANTOS R A

About SANTOS R A

(Univ. Federal do Rio de Janeiro, RJ, BRA)

About Univ. Federal do Rio de Janeiro, RJ, BRA

, 
FREIRE F L JR

About FREIRE F L JR

(Pontificia Univ. Catolica do Rio de Janeiro, R.J., BRA)

About Pontificia Univ. Catolica do Rio de Janeiro, R.J., BRA

, 
CARIUS R

About CARIUS R

(KFA-Juelich, Juelich, DEU)

About KFA-Juelich, Juelich, DEU

, 
FINGER F

About FINGER F

(KFA-Juelich, Juelich, DEU)

About KFA-Juelich, Juelich, DEU


Material：
Diamond and Related Materials  (Diam Relat Mater)

About Diamond and Related Materials


Volume： 7  Issue： 8  Page： 1155-1162  Publication year： Aug. 1998 
JST Material Number： W0498A  ISSN： 0925-9635  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*Carbon

About Carbon

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
elastic recoidal detection analysis

About elastic recoidal detection analysis

,...
   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=98A0739751&from=J-GLOBAL&jstjournalNo=W0498A") }}
JST classification (1)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films 
(BK14040E)

About Semiconductor thin films

Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
Si

About Si

, 
安定性

About 安定性


Return to Previous Page

TOP

BOTTOM