About STEINER P
About Fraunhofer Inst. Solid State Technology, Munich, DEU
About LANG W
About Fraunhofer Inst. Solid State Technology, Munich, DEU
About Thin Solid Films
About micromachining
About Techniques for samples
About Manufacturing technology of solid-state devices
About 多孔質シリコン
About マイクロマシニング
About 応用