Evaluation of Boron Contamination in Clean Rooms by Inductively Coupled Plasma Mass Spectrometry.

SAKAKIBARA TAKAAKI; TAKEDA NAOKI

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J-GLOBAL ID：200902137197467689 Reference number：93A0705382

Evaluation of Boron Contamination in Clean Rooms by Inductively Coupled Plasma Mass Spectrometry.

ICP-MS分析法によるクリーンルームのホウ素汚染評価

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Volume： 12th Page： 301-304 Publication year： Apr. 1993
JST Material Number： Y0789A Document type： Proceedings
Article type：短報 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Air purification

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