Art
J-GLOBAL ID：200902137334100852   Reference number：97A1011395

Frequency modulation detection high vacuum scanning force microscope with a self-oscillating piezoelectric cantilever.

自励振動する圧電体カンチレバーを用いた周波数変調検出型の高真空走査型力顕微鏡
Author (5)：
CHU J

About CHU J

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN

, 
ITOH T

About ITOH T

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN

, 
LEE C

About LEE C

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN

, 
SUGA T

About SUGA T

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN

, 
WATANABE K

About WATANABE K

(Seiko Instruments Inc., Shizuoka, JPN)

About Seiko Instruments Inc., Shizuoka, JPN


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 15  Issue： 5  Page： 1647-1651  Publication year： Sep. 1997 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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force microscope

About force microscope

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
PZT

About PZT

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Microscopy determination of structures 
(BK01040E)

About Microscopy determination of structures

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
自励振動

About 自励振動

, 
圧電体

About 圧電体

, 
カンチレバー

About カンチレバー

, 
周波数変調

About 周波数変調

, 
高真空

About 高真空

, 
走査型力顕微鏡

About 走査型力顕微鏡


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