Structural properties of microcrystalline silicon in the transition from highly crystalline to amorphous growth.

HOUBEN L; LUYSBERG M; HAPKE P; CARIUS R; FINGER F; WAGNER H

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J-GLOBAL ID：200902137367955365 Reference number：98A0570416

Structural properties of microcrystalline silicon in the transition from highly crystalline to amorphous growth.

高結晶性成長から非晶質成長への遷移における微結晶粒シリコンの構造特性

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Material：
Volume： 77 Issue： 6 Page： 1447-1460 Publication year： Jun. 1998
JST Material Number： E0753B ISSN： 0141-8610 CODEN： PMAADG Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Semiconductor thin films

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